Core Facilities

Mask Aligner

The Suss MJB4 is used to accurately position a mask over a wafer with photo resist on it and expose the photo resist with UV light.   The MJB4 can achieve resolutions of 2 microns in soft contact mode down to 0.8 microns with vacuum  contact.

MJB4 capabilities

  • 4" wafers
  • 5" X5" inch masks
  • Vibration isolation table
  • Objectives:UM Plan Fl 5X, UM Plan Fl 10X, LM Plan Fl 20X

Suss MJB4 page

  • Manufacturer: Suss MicroTec
  • Equipment Model: Suss MJB4
  • Location: 121 Institute for Genomic Biology
  • Contact Person: Glenn Fried 333-4328
  • Fees & Consumables: